@Article{GilBonSanTraCor:2008:AdAmHy,
               author = "Gil, Capote and Bonetti, Luis Fernando and Santos, L{\'u}cia 
                         Vieira and Trava Airoldi, Vladimir Jesus and Corat, Evaldo 
                         Jos{\'e}",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais 
                         (INPE)}",
                title = "Adherent amorphous hydrogenated carbon films on metals deposited 
                         by plasma enhanced chemical vapor deposition",
              journal = "Thin Solid Films",
                 year = "2008",
               volume = "516",
               number = "12",
                pages = "4011--4017",
                month = "Apr.",
             keywords = "amorphous hydrogenated carbon, plasma enhanced chemical vapor 
                         deposition, silicon interlayer, adhesion, X-ray photoelectron 
                         spectra, mechanical properties.",
             abstract = "This paper reports the findings of a study of the structural, 
                         mechanical, and tribological properties of amorphous hydrogenated 
                         carbon (a-C:H) coatings for industrial applications. These thin 
                         films have proven quite advantageous in many tribological 
                         applications, but for others, thicker films are required. In this 
                         study, in order to overcome the high residual stress and low 
                         adherence of a-C:H films on metal substrates, a thin amorphous 
                         silicon interlayer was deposited as an interface. Amorphous 
                         silicon and a-C:H films were grown by using a radio frequency 
                         plasma enhanced chemical vapor deposition system at 13.56 MHz in 
                         silane and methane atmospheres, respectively. The X-ray 
                         photoelectron spectroscopy technique was employed to analyze the 
                         chemical bonding within the interfaces. The chemical composition 
                         and atomic density of the a-C:H films were determined by ion beam 
                         analysis. The film microstructure was studied by means of Raman 
                         scattering spectroscopy. The total stress was determined through 
                         the measurement of the substrate curvature, using a profilometer, 
                         while micro-indentation experiments helped determine the films' 
                         hardness. The friction coefficient and critical load were 
                         evaluated by using a tribometer. The results showed that the use 
                         of the amorphous silicon interlayer improved the a-C:H film 
                         deposition onto metal substrates, producing good adhesion, low 
                         compressive stress, and a high degree of hardness. SiC was 
                         observed in the interface between the amorphous silicon and a-C:H 
                         films. The composition, the microstructure, the mechanical and 
                         tribological properties of the films were strongly dependent on 
                         the self-bias voltages. The tests confirmed the importance of the 
                         intensity of ion bombardment during film growth on the mechanical 
                         and tribological properties of the films. (c) 2007 Elsevier B.V. 
                         All rights reserved.",
                  doi = "10.1016/j.tsf.2007.08.007",
                  url = "http://dx.doi.org/10.1016/j.tsf.2007.08.007",
                 issn = "0040-6090",
             language = "en",
           targetfile = "adherent amorphous.pdf",
        urlaccessdate = "02 maio 2024"
}